Publication | Closed Access

A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy

Materials ScienceAtomic Force MicroscopyNew Microtensile TesterEngineeringMicromachinesMicroscopyMicrofabricationScanning Probe MicroscopyMechanical EngineeringScanning Force MicroscopyMicroelectromechanical SystemsMicro-electromechanical SystemMicrofluidicsMicrostructureMems Materials