Influence of anneals in oxygen ambient on stress of thick polysilicon layers

Diffusivity of oxygen in silicon at the donor formation temperature

Michael Stavola, J. R. Patel, L. C. Kimerling et al. · Applied Physics Letters · 1983 · 217 citations

Natural Sciences, Materials Science, Physics +17

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +16

Novel Process For A Monolithic Integrated Accelerometer

M. Offenberg, Franz Lärmer, B. Elsner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 121 citations

Engineering, Manufacturing Engineering, Microfabrication +16

Diffusion of oxygen in silicon

G. D. Watkins, J. W. Corbett, Robert McDonald · Journal of Applied Physics · 1982 · 70 citations

Engineering, Materials Engineering, Materials Science +6

Design properties of polycrystalline silicon

T. I. Kamins · Sensors and Actuators A Physical · 1990 · 61 citations

Engineering, Materials Engineering, Materials Science +14