Franz Lärmer

Novel Process For A Monolithic Integrated Accelerometer

M. Offenberg, Franz Lärmer, B. Elsner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 121 citations

Engineering, Manufacturing Engineering, Microfabrication +16

A novel micromachining process for the fabrication of monocrystalline Si-membranes using porous silicon

S. Armbruster, Felix Schäfer, Gerhard Lammel et al. · 2004 · 62 citations

Engineering, Electrical Engineering, Materials Engineering +17

A surface micromachined silicon gyroscope using a thick polysilicon layer

K. Funk, H. Emmerich, A. Schilp et al. · 1999 · 57 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Acceleration Sensor in Surface Micromachining for Airbag Applications with High Signal/Noise Ratio

M. Offenberg, H. Münzel, D. Schubert et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1996 · 41 citations

Engineering, Mechatronics Engineering, Microelectromechanical Systems +16

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Arnim Höchst, R. Scheuerer, H. Stahl et al. · Sensors and Actuators A Physical · 2004 · 29 citations

Engineering, Materials Engineering, Materials Science +17