Concepedia

Arnim Höchst

AH

Statistics

Publications

2

Citations

66

H-Index

2

Active since

2004

Affiliations

Robert Bosch (Germany)(Current)

Arnim Höchst is an author at Robert Bosch (Germany) specializing in mechanical engineering, engineering, and materials engineering.

Top concepts

EngineeringMechanical EngineeringSensorsChemistryThin Films3D PrintingSensor DesignApplied PhysicsSurface ScienceMaterial Science

Publications per year

2004–2016

2

Publications

2

Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

Matthias C. Schwille, Timo Schössler, Jonas Barth et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 37 citations

Engineering, Mechanical Engineering, Chemistry +16

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Arnim Höchst, R. Scheuerer, H. Stahl et al. · Sensors and Actuators A Physical · 2004 · 29 citations

Engineering, Implantable Sensor, Sensors +10

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