Timo Schössler

Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

Matthias C. Schwille, Timo Schössler, Jonas Barth et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 37 citations

Engineering, Mechanical Engineering, Chemistry +16

Effect of high temperature annealing on resistivity and temperature coefficient of resistance of sputtered platinum thin films of SiO2/Pt/SiOx interfaces

Timo Schössler, Florian Schön, Christian Lemier et al. · Thin Solid Films · 2020 · 31 citations

Materials Science, Materials Engineering, Material Analysis +11

Temperature dependence of the sticking coefficients of bis-diethyl aminosilane and trimethylaluminum in atomic layer deposition

Matthias C. Schwille, Timo Schössler, Florian Schön et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 28 citations

Materials Science, Surface Characterization, Bis-diethyl Aminosilane +13

Reliability improvements of thin film platinum resistors on wafer-level and micro-hotplates at stress temperatures in the range of 140–290 °C

Timo Schössler, Florian Schön, Christian Lemier et al. · Microelectronics Reliability · 2019 · 10 citations

Materials Science, Defect Tolerance, Electrical Engineering +10