K. Funk

Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications

F. Laerme, A. Schilp, K. Funk et al. · 1999 · 170 citations

Engineering, Radio Frequency, Improving Uniformity +19

A surface micromachined silicon gyroscope using a thick polysilicon layer

K. Funk, H. Emmerich, A. Schilp et al. · 1999 · 56 citations

Engineering, Micromachines, New Silicon Gyroscope +13

A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

A. Thomae, R. Schellin, Markus Lang et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1999 · 18 citations

Experimental characterization of dynamic micromechanical transducers

Franz Lärmer, A. Schilp, K. Funk et al. · Journal of Micromechanics and Microengineering · 1996 · 11 citations

Engineering, Dynamic Micromechanical Transducers, Resonant Structures +15

Study of silicide contacts to SiGe source/drain

A. Lauwers, M.J.H. van Dal, Peter Verheyen et al. · Microelectronic Engineering · 2006 · 10 citations

Sige Source/drain, Engineering, Microfabrication +7