Concepedia

R. Schellin

RS

10

Publications

288

Citations

10

H-Index

1992

Active since

Affiliations

Darmstadt University of Applied Sciences(Current)

Merck (Germany)

Technical University of Darmstadt

R. Schellin is an author at Darmstadt University of Applied Sciences specializing in engineering, mechanical engineering, and microfabrication.

Top concepts

EngineeringMicrofabricationMechanical EngineeringNoiseAeroacousticsApplied PhysicsInstrumentationMicroelectronicsElectrical EngineeringUltrasound

Publications per year

1992–1999

10

Publications

10

A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

R. Schellin, G. Hess · Sensors and Actuators A Physical · 1992 · 83 citations

Engineering, Microfabrication, Mechanical Engineering +7

Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters

R. Schellin, G. Hess, Wolfgang Kühnel et al. · Sensors and Actuators A Physical · 1994 · 45 citations

Aeroacoustics, Gas Flow Meters, Engineering +11

Plasma deposition of low-stress electret films for electroacoustic and solar cell applications

J.E. Klemberg-Sapieha, L. Martinů, M. R. Wertheimer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 33 citations

Plasma Deposition, Engineering, Electric Charge Retention +19

Silicon subminiature microphones with organic piezoelectric layers-fabrication and acoustical behavior

R. Schellin, G. Hess, Wolfgang Kuehnel et al. · IEEE Transactions on Electrical Insulation · 1992 · 33 citations

Engineering, Pvdf Films, Mechanical Engineering +17

Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms

R. Schellin, M. Strecker, U. Nothelfer et al. · Sensors and Actuators A Physical · 1995 · 18 citations

Aeroacoustics, Engineering, Sensors +10

Rows per page

1–5 of 10