G. Hess

A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

R. Schellin, G. Hess · Sensors and Actuators A Physical · 1992 · 83 citations

Engineering, Materials Engineering, Materials Science +14

Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes

R. Kressmann, Martin Klaiber, G. Hess · Sensors and Actuators A Physical · 2002 · 65 citations

Engineering, Materials Engineering, Materials Science +15

Micromachined subminiature condenser microphones in silicon

Wolfgang Kühnel, G. Hess · Sensors and Actuators A Physical · 1992 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters

R. Schellin, G. Hess, Wolfgang Kühnel et al. · Sensors and Actuators A Physical · 1994 · 45 citations

Engineering, Materials Science, Mechanical Engineering +17

Silicon subminiature microphones with organic piezoelectric layers-fabrication and acoustical behavior

R. Schellin, G. Hess, Wolfgang Kuehnel et al. · IEEE Transactions on Electrical Insulation · 1992 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +17