F. Laerme is an author at Robert Bosch (Germany) specializing in electronic packaging, instrumentation, and electromagnetic compatibility.
Top concepts
EngineeringPlasma ScienceApplied PhysicsInstrumentationMicroelectronicsMicrofabricationElectronic PackagingMagnetohydrodynamicsElectrical EngineeringElectromagnetic Compatibility
Publications per year
1999–1999
1
1
Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications
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