A. Schilp is an author at Robert Bosch (Germany) specializing in instrumentation, microfabrication, and engineering.
Top concepts
EngineeringInstrumentationMicrofabricationMicroelectronicsSensor TechnologyMechanical EngineeringMechanicsMechatronicsPlasma ScienceApplied Physics
Publications per year
1996–1999
3
3
Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications
A surface micromachined silicon gyroscope using a thick polysilicon layer
K. Funk, H. Emmerich, A. Schilp et al. · 1999 · 56 citations
Rows per page
1–3 of 3