Effect of Fluorine on the Diffusion of Boron in Amorphous Silicon - Concepedia

Concepedia

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Effect of Fluorine on the Diffusion of Boron in Amorphous Silicon

13

Citations

8

References

2002

Year

Jeannette M. Jacques, L. S. Robertson, K. S. Jones, J. Bennett

MRS Proceedings

Materials ScienceBoron NitrideEngineeringApplied PhysicsAmorphous SiliconAmorphous SolidSilicon On Insulator

References

	Year	Citations

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