Concepedia

Judy W. Chow

JW

4

Publications

174

Citations

4

H-Index

1998

Active since

Affiliations

Varian Medical Systems (United States)(Current)

STEAG (Germany)

Judy W. Chow is an author at Varian Medical Systems (United States) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsCrystalline DefectsMicrostructureSemiconductorsNanoelectronicsSurface ScienceMicroelectronics

Publications per year

1998–1999

4

Publications

4

Effect of fluorine on the diffusion of boron in ion implanted Si

Daniel F. Downey, Judy W. Chow, E. Ishida et al. · Applied Physics Letters · 1998 · 108 citations · Full text

Materials Science, Tilt Angle, Ion Implantation +12

The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF<sup>2</sup> and Arsenic Ion Implants

Daniel F. Downey, Judy W. Chow, Wilfried Lerch et al. · MRS Proceedings · 1998 · 32 citations

Materials Engineering, Materials Science, Ion Implantation +6

Boron Ultrashallow Junction Formation in Silicon by Low‐Energy Implantation and Rapid Thermal Annealing in Inert and Oxidizing Ambient

W. Lerch, Michael Glück, N. A. Stolwijk et al. · Journal of The Electrochemical Society · 1999 · 18 citations

Materials Science, Semiconductors, Semiconductor Technology +14

Optimization of RTA parameters to produce ultra-shallow, highly activated B+, BF 2 + , and As+ ion implanted junctions

Daniel F. Downey, S. Marcus, Judy W. Chow · Journal of Electronic Materials · 1998 · 16 citations

Rta Parameters, Electrical Engineering, Engineering +6

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