Concepedia

E. Ishida

EI

7

Publications

418

Citations

7

H-Index

1995

Active since

Affiliations

Advanced Micro Devices (United States)(Current)

Varian Medical Systems (United States)

The University of Texas at Austin

University of Florida

E. Ishida is an author at Advanced Micro Devices (United States) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMaterial ScienceElectrical EngineeringMicrostructureCrystalline DefectsPhysicsChemistryEducation

Publications per year

1995–2002

7

Publications

7

Ion implantation technology - 96

E. Ishida, Soumik Banerjee, S. Mehta · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1996 · 131 citations

Materials Engineering, Materials Science, Electrical Engineering +10

Shallow junction doping technologies for ULSI

E.C. Jones, E. Ishida · Materials Science and Engineering R Reports · 1998 · 120 citations

Electrical Engineering, Engineering, Nanoelectronics +4

Effect of fluorine on the diffusion of boron in ion implanted Si

Daniel F. Downey, Judy W. Chow, E. Ishida et al. · Applied Physics Letters · 1998 · 108 citations · Full text

Materials Science, Tilt Angle, Ion Implantation +12

Dose rate and thermal budget optimization for ultrashallow junctions formed by low-energy (2–5 keV) ion implantation

Michael Craig, A. Sultan, Keerthi Dorai Swamy Reddy et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

Engineering, Dose Rate, Ion Beam Instrumentation +16

Study of electrical measurement techniques for ultra-shallow dopant profiling

E. Ishida, Susan B. Felch · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations

Device Modeling, Ultra-shallow Dopant Profiles, Electrical Engineering +13

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