Concepedia

S. Marcus

SM

11

Publications

409

Citations

11

H-Index

1993

Active since

Affiliations

ASM International(Current)

STEAG (Germany)

Varian Medical Systems (United States)

Arizona State University

S. Marcus is an author at ASM International specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceMaterials EngineeringPhysicsMicroelectronicsSurface TechnologyElectrical Engineering

Publications per year

1993–2007

11

Publications

11

Film Uniformity in Atomic Layer Deposition

Kai‐Erik Elers, Tom Blomberg, M. Peussa et al. · Chemical Vapor Deposition · 2006 · 124 citations

Materials Science, Surface Technology, Engineering +11

TiCl[sub 4] as a Precursor in the TiN Deposition by ALD and PEALD

Kai‐Erik Elers, Jerry Winkler, K. Doran Weeks et al. · Journal of The Electrochemical Society · 2005 · 77 citations

Engineering, Tin Film Deposition, Chemistry +17

Characterization of low pressure chemically vapor-deposited tungsten nitride films

S. Marcus, Richard F. Foster · Thin Solid Films · 1993 · 39 citations

Materials Science, Engineering, Surface Science +5

The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF<sup>2</sup> and Arsenic Ion Implants

Daniel F. Downey, Judy W. Chow, Wilfried Lerch et al. · MRS Proceedings · 1998 · 32 citations

Materials Engineering, Materials Science, Ion Implantation +6

Relationships among equivalent oxide thickness, nanochemistry, and nanostructure in atomic layer chemical-vapor-deposited Hf–O films on Si

Soumik Dey, Atanu Das, Ming-Li Tsai et al. · Journal of Applied Physics · 2004 · 26 citations

Oxide Heterostructures, Materials Science, Engineering +15

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