Concepedia

Author

Adam Bertuch

Massachusetts Institute of Technology

Also Known As

A. Bertuch, A.F. Bertuch, Adam Bertuch, Adam F. Bertuch

26

Publications

263

Citations

6

H-Index

20

Concepts

All Affiliations

Massachusetts Institute of Technology
AB

About

Adam Bertuch is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

170

2

Applied Physics

4

4

140

3

Chemistry

3

3

118

4

Materials Engineering

3

3

103

5

Chemical Engineering

2

2

88

Adam Bertuch

×

6

Publications

231

Citations

6

H-Index

YearCitations

Atomic layer deposition of molybdenum oxide using bis(tert-butylimido)bis(dimethylamido) molybdenum

Adam Bertuch, Ganesh Sundaram, M.J. Saly,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2013

61

Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS<sub>2</sub> Monolayers

B. D. Keller, Adam Bertuch, J. Provine,

Chemistry of Materials

2017

51

Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(<i>tert</i>-butylimido)bis(dimethylamido) molybdenum

Adam Bertuch, B. D. Keller, Nicola Ferralis,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2016

37

Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum

Adam Bertuch, Laurent Lecordier, Mark J. Dalberth,

ECS Meeting Abstracts

2012

30

Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition

Asad J. Mughal, Timothy N. Walter, Kayla A. Cooley,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2019

27

Effects of “fast” rapid thermal anneals on sub-keV boron and BF2 ion implants

Daniel F. Downey, S. Falk, Adam Bertuch,

Journal of Electronic Materials

1999

25

Page 1