Concepedia

Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum

Adam Bertuch, Laurent Lecordier, Mark J. Dalberth, Ganesh Sundaram, Jill Becker, Eric Deguns, M.J. Saly, D.F. Moser, Ravi Kanjolia

ECS Meeting Abstracts · 2012 · 30 citations · 0 references

DOI

Concepts

Abstract

Abstract not Available.