Concepedia

Publication | Closed Access

Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum

DOI

30

Citations

0

References

2012

Year

Adam Bertuch, Laurent Lecordier, Mark J. Dalberth, Ganesh Sundaram, Jill Becker, Eric Deguns, M.J. Saly, D.F. Moser, Ravi Kanjolia
ECS Meeting Abstracts

Abstract

Abstract not Available.