M.J. Saly

Precursor design and reaction mechanisms for the atomic layer deposition of metal films

Karla Bernal Ramos, M.J. Saly, Yves J. Chabal · Coordination Chemistry Reviews · 2013 · 114 citations

Materials Science, Precursor Design, Engineering +9

Low Temperature Growth of High Purity, Low Resistivity Copper Films by Atomic Layer Deposition

Thomas J. Knisley, Thiloka C. Ariyasena, Timo Sajavaara et al. · Chemistry of Materials · 2011 · 77 citations

Materials Engineering, Materials Science, Copper Oxide Materials +15

Substrate Selectivity of (^tBu-Allyl)Co(CO)₃during Thermal Atomic Layer Deposition of Cobalt

Jinhee Kwon, M.J. Saly, Mathew D. Halls et al. · Chemistry of Materials · 2012 · 63 citations

Atomic layer deposition of molybdenum oxide using bis(tert-butylimido)bis(dimethylamido) molybdenum

Adam Bertuch, Ganesh Sundaram, M.J. Saly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 61 citations

Volatility and High Thermal Stability in Mid- to Late-First-Row Transition-Metal Diazadienyl Complexes

Thomas J. Knisley, M.J. Saly, Mary Jane Heeg et al. · Organometallics · 2011 · 52 citations

Materials Science, Inorganic Chemistry, High Thermal Stability +12