M.J. Saly - Concepedia

Author

M.J. Saly

Wayne State University

Also Known As

M.J. Saly, Mark J. Saly, Mark Saly, Saly, M.J., Saly, Mark J.

Publications

635

Citations

H-Index

Concepts

All Affiliations

Wayne State University The University of Texas at Dallas Helmholtz-Zentrum Dresden-Rossendorf Applied Materials (United States)

About

M.J. Saly is an author at Wayne State University specializing in chemistry, materials science, and engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	13	460
2	Applied Physics	9	9	346
3	Natural Sciences	2	2	30
4	Chemical Engineering	2	2	70
5	Biochemistry	1	1	11

M.J. Saly

Publications

606

Citations

H-Index

Page 1

	Year	Citations
Precursor design and reaction mechanisms for the atomic layer deposition of metal films Karla Bernal Ramos, M.J. Saly, Yves J. Chabal Coordination Chemistry Reviews Materials SciencePrecursor DesignEngineeringNanotechnologySurface Science	2013	114
Low Temperature Growth of High Purity, Low Resistivity Copper Films by Atomic Layer Deposition Thomas J. Knisley, Thiloka C. Ariyasena, Timo Sajavaara, Chemistry of Materials Materials EngineeringMaterials ScienceCopper Oxide MaterialsEngineeringSurface Science	2011	77
Substrate Selectivity of (<sup>t</sup>Bu-Allyl)Co(CO)<sub>3</sub>during Thermal Atomic Layer Deposition of Cobalt Jinhee Kwon, M.J. Saly, Mathew D. Halls, Chemistry of Materials	2012	63
Atomic layer deposition of molybdenum oxide using bis(tert-butylimido)bis(dimethylamido) molybdenum Adam Bertuch, Ganesh Sundaram, M.J. Saly, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films	2013	61
Volatility and High Thermal Stability in Mid- to Late-First-Row Transition-Metal Diazadienyl Complexes Thomas J. Knisley, M.J. Saly, Mary Jane Heeg, Organometallics Materials ScienceInorganic ChemistryHigh Thermal StabilityEngineeringCoordination Complex	2011	52
Volatility, High Thermal Stability, and Low Melting Points in Heavier Alkaline Earth Metal Complexes Containing Tris(pyrazolyl)borate Ligands M.J. Saly, Mary Jane Heeg, Charles H. Winter Inorganic Chemistry High Thermal StabilityEngineeringChemistryInorganic MaterialInorganic Compound	2009	48
Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum Adam Bertuch, Laurent Lecordier, Mark J. Dalberth, ECS Meeting Abstracts Inorganic ChemistryAbstract AlgebraEngineeringSurface ScienceAbstract Object Theory	2012	30
Thermal atomic layer deposition of ruthenium metal thin films using nonoxidative coreactants Stefan Cwik, Keenan N. Woods, M.J. Saly, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceEngineeringNanotechnologySurface ScienceApplied Physics	2019	26
Atomic Layer Deposition of Cobalt Silicide Thin Films Studied by in Situ Infrared Spectroscopy Karla Bernal-Ramos, M.J. Saly, Ravindra K. Kanjolia, Chemistry of Materials Materials ScienceSurface CharacterizationSitu Infrared SpectroscopyEngineeringNanomaterials	2015	24
Atomic layer deposition of CaB2O4 films using bis(tris(pyrazolyl)borate)calcium as a highly thermally stable boron and calcium source M.J. Saly, Frans Munnik, Charles H. Winter Journal of Materials Chemistry Materials ScienceChemical EngineeringEngineeringCab2o4 FilmsGrowth Rate	2010	22

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