Concepedia

Laurent Lecordier

LL

3

Publications

105

Citations

3

H-Index

2011

Active since

Affiliations

Applied Nanotech (United States)(Current)

Laurent Lecordier is an author at Applied Nanotech (United States) specializing in engineering, surface science, and chemistry.

Top concepts

EngineeringSurface ScienceChemistryThin FilmsApplied PhysicsMaterial ScienceNanomaterialsNanotechnologyNanofabricationSurface Chemistry

Publications per year

2011–2018

3

Publications

3

Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by <i>in situ</i> spectroscopic ellipsometry

Laurent Lecordier, Sebastiaan Johan Frans Herregods, Silvia Armini · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 54 citations · Full text

Materials Science, Surface Characterization, Engineering +15

Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum

Adam Bertuch, Laurent Lecordier, Mark J. Dalberth et al. · ECS Meeting Abstracts · 2012 · 30 citations

Inorganic Chemistry, Abstract Algebra, Engineering +7

Atomic Layer Deposition of AlN with Tris(Dimethylamido)Aluminum and NH<sub>3</sub>

Liu Guo, Eric Deguns, Laurent Lecordier et al. · ECS Transactions · 2011 · 21 citations

Materials Engineering, Materials Science, Electrical Engineering +14

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