Concepedia

M. Peussa

MP

6

Publications

244

Citations

6

H-Index

1999

Active since

Affiliations

University of Helsinki(Current)

M. Peussa is an author at University of Helsinki specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringSurface ScienceThin FilmsApplied PhysicsMaterial ScienceChemistryPhysicsMedicineBiophysicsRadiometry

Publications per year

1999–2006

6

Publications

6

Film Uniformity in Atomic Layer Deposition

Kai‐Erik Elers, Tom Blomberg, M. Peussa et al. · Chemical Vapor Deposition · 2006 · 124 citations

Materials Science, Surface Technology, Engineering +11

Composition and thickness determination of thin oxide films: comparison of different programs and methods

Väino Sammelselg, Jaan Aarik, A. Aidla et al. · Journal of Analytical Atomic Spectrometry · 1999 · 42 citations

Engineering, Thin Film Process Technology, Thickness Determination +19

Thin film deposition of lanthanum manganite perovskite by the ALE process

Ola Nilsen, M. Peussa, Helmer Fjellvåg et al. · Journal of Materials Chemistry · 1999 · 39 citations

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Kaupo Kukli, M. Peussa, Leena‐Sisko Johansson et al. · Materials science forum · 1999 · 14 citations

Materials Science, Engineering, Surface Science +8

Reactions of bis(cyclopentadienyl)zirconium dichloride with porous silica surface

Minna Kröger-Laukkanen, M. Peussa, Markku Leskelä et al. · Applied Surface Science · 2001 · 13 citations

Inorganic Chemistry, Engineering, Surface Science +3

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