Concepedia

Wilfried Lerch

WL

Statistics

Publications

11

Citations

330

H-Index

10

Active since

1998

Affiliations

Mattson Technology (Germany)(Current)

Daimler (Germany)

Centre National de la Recherche Scientifique

Varian Medical Systems (United States)

Laboratoire d'Analyse et d'Architecture des Systèmes

Wilfried Lerch is an author at Mattson Technology (Germany) specializing in materials science, materials engineering, and electronic materials.

Publications per year

1998–2019

11

Publications

11

Advanced Thermal Processing of Ultrashallow Implanted Junctions Using Flash Lamp Annealing

W. Skorupa, T. Gebel, R.A. Yankov et al. · Journal of The Electrochemical Society · 2005 · 83 citations

Engineering, Materials Engineering, Materials Science +17

Studying dopant diffusion from Poly-Si passivating contacts

Frank Feldmann, Jonas Schön, Jürgen Niess et al. · Solar Energy Materials and Solar Cells · 2019 · 80 citations

Engineering, Materials Engineering, Materials Science +12

The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF<sup>2</sup> and Arsenic Ion Implants

Daniel F. Downey, Judy W. Chow, Wilfried Lerch et al. · MRS Proceedings · 1998 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +14

Detailed investigation of Ge–Si interdiffusion in the full range of Si1−xGex(≤x≤1) composition

Mathieu Gavelle, El Mehdi Bazizi, E. Scheid et al. · Journal of Applied Physics · 2008 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +13

Millisecond Annealing: Past, Present and Future

P. J. Timans, J. Gelpey, S. McCoy et al. · MRS Proceedings · 2006 · 30 citations

Engineering, Computer Engineering, Parallel Computing +4

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