Concepedia

Influence of the target temperature on a reactive sputtering process

Alain Billard, D. Mercs, F. Perry, C. Frantz

Surface and Coatings Technology · 1999 · 43 citations · 11 references

DOI

Concepts

References

11

Ion Bombardment of Solids

L. N. Large · Electronics and Power · 1968 · 574 citations

, , +9

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

, , +13

Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode

S. Schiller, G. Beister, William K. Sieber · Thin Solid Films · 1984 · 145 citations

, , +17

New results in d.c. reactive magnetron deposition of TiNx films

J. Musil, S. Kadlec, J Vyskočil et al. · Thin Solid Films · 1988 · 84 citations

, , +12

Optical emission in magnetrons: Nonlinear aspects

S. M. Rossnagel, K. L. Saenger · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 47 citations

, , +12