Concepedia

New results in d.c. reactive magnetron deposition of TiNx films

J. Musil, S. Kadlec, J Vyskočil, V. Valvoda

Thin Solid Films · 1988 · 84 citations · 12 references

DOI

Concepts

References

12

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

, , +17

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

, , +12

Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

William D. Sproul · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 91 citations

, , +10

Partial pressure control of reactively sputtered titanium nitride

A. F. Hmiel · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 83 citations

, , +13

Hysteresis effect in reactive sputtering: a problem of system stability

S. Kadlec, J. Musil, H Vyskocil · Journal of Physics D Applied Physics · 1986 · 77 citations

, , +9