Reactive Deposition

Reactive Deposition is a thin-film deposition technique in which a metallic or elemental target material is deposited in the presence of a reactive gas, leading to the in-situ formation of a compound thin film through chemical reaction at the substrate surface.

356

Publications

15.4K

Citations

1.3K

Authors

386

Institutions

Publications per year

2017–2026

35

Authors

1.3K

  1. TS
    Takashi Suemasu

    University of Tsukuba, Japan

    19 publications · 827 citations

    16

    h-index

  2. FH
    Fumio Hasegawa

    University of Tsukuba, Japan

    17 publications · 791 citations

    15

    h-index

  3. AC
    A. C. C. Tseung

    City, University of London, United Kingdom

    7 publications · 185 citations

    7

    h-index

  4. CR
    C. R. Aita

    University of Wisconsin–Milwaukee, United States

    7 publications · 325 citations

    7

    h-index

  5. SP
    San Ping Jiang

    Curtin University, Australia

    7 publications · 185 citations

    7

    h-index

1–5 of 1.3K

Venues

  1. Journal of Applied Physics

    28 publications · 1.2K citations

    19

    h-index

  2. 19

    h-index

  3. Surface and Coatings Technology

    24 publications · 910 citations

    19

    h-index

  4. Thin Solid Films

    28 publications · 1.9K citations

    18

    h-index

  5. Applied Physics Letters

    23 publications · 879 citations

    18

    h-index

1–5