Concepedia

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson, J.‐E. Sundgren, J. E. Greene

Thin Solid Films · 1989 · 327 citations · 35 references

DOI

Concepts

References

35

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Nucleation and growth of thin films

J. A. Venables, G. D. T. Spiller, M. Hanbücken · Reports on Progress in Physics · 1984 · 2.9K citations

, , +17

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

, , +12

The development of grain structure during growth of metallic films

C.R.M. Grovenor, H. T. G. Hentzell, D. A. Smith · Acta Metallurgica · 1984 · 399 citations

, , +14

Ion-beam-induced epitaxial vapor-phase growth: A molecular-dynamics study

Karl‐Heinz Müller · Physical review. B, Condensed matter · 1987 · 312 citations

, , +17