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Nucleation and growth of thin films
2.8K
Citations
207
References
1984
Year
Materials ScienceThin Film FormationEngineeringNucleation TheoriesCrystal Growth TechnologySurface ScienceApplied PhysicsNucleationThin Film Process TechnologyThin FilmsChemical DepositionCrystal FormationCrystallographyThin Film ProcessingMicrostructure
The thermodynamics of adsorption and the kinetics of crystal growth are closely related. This review examines nucleation and growth processes in thin film formation. The review emphasizes quantitative nucleation theories and the use of electron microscopy and surface techniques to test them. Experimental examples illustrate island, layer‑plus‑island (Stranski–Krastanov), and layer growth modes, and the shapes of growing crystallites are briefly discussed.
A review is given of the nucleation and growth processes occurring in thin film formation. Emphasis is given to quantitative nucleation theories and to the role of electron microscopy and surface techniques in providing data to test such theories. The relations between the thermodynamics of adsorption and the kinetics of crystal growth is stressed. Experimental examples are taken from the island growth, layer plus island (or Stranski-Krastanov) and layer growth modes. The shapes of growing crystallites are briefly discussed.
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