S. Kadlec

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Publications

Citations

1.6K

H-Index

Active since

1986

Affiliations

FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic(Current)

Charles University

Czech Academy of Sciences

HVM Plasma (Czechia)

Institute of Physics of the Slovak Academy of Sciences

S. Kadlec is an author at FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic specializing in natural sciences, materials science, and surface science.

ORCID

Publications per year

1986–2019

Publications

Low-energy (∼100 eV) ion irradiation during growth of TiN deposited by reactive magnetron sputtering: Effects of ion flux on film microstructure

Lars Hultman, W.‐D. Münz, J. Musil et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +16

Reactive sputtering of TiN films at large substrate to target distances

J. Musil, S. Kadlec · Vacuum · 1990 · 112 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ion-assisted sputtering of TiN films

J. Musil, S. Kadlec, V. Valvoda et al. · Surface and Coatings Technology · 1990 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +12

New results in d.c. reactive magnetron deposition of TiNx films

J. Musil, S. Kadlec, J Vyskočil et al. · Thin Solid Films · 1988 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +12

Hysteresis effect in reactive sputtering: a problem of system stability

S. Kadlec, J. Musil, H Vyskocil · Journal of Physics D Applied Physics · 1986 · 77 citations

Engineering, Materials Engineering, Materials Science +9

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