Concepedia

S. Schiller

SS

Statistics

Publications

39

Citations

1.6K

H-Index

20

Active since

1975

Affiliations

Von Ardenne (Germany)(Current)

University of Applied Sciences and Arts Hildesheim/Holzminden/Göttingen

Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology

Sheffield Hallam University

Western University

S. Schiller is an author at Von Ardenne (Germany) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringPhysicsMicroelectronicsThin FilmsElectrical EngineeringCorrosion

Publications per year

1975–2022

39

Publications

39

Pulsed magnetron sputter technology

S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 334 citations

Magnetism, Engineering, Applied Physics +4

Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode

S. Schiller, G. Beister, William K. Sieber · Thin Solid Films · 1984 · 145 citations

Materials Science, Materials Engineering, Material Analysis +10

Reactive d.c. high-rate sputtering as production technology

S. Schiller, U. Heisig, Chr. Korndörfer et al. · Surface and Coatings Technology · 1987 · 116 citations

Engineering, Production Technology, Industrial Engineering +5

Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering

S. Schiller, G. Beister, William K. Sieber et al. · Thin Solid Films · 1981 · 99 citations

Materials Science, Materials Engineering, Structural Properties +11

Reactive D.C. sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films

S. Schiller, U. Heisig, K. Steinfelder et al. · Thin Solid Films · 1979 · 63 citations

Materials Science, Materials Engineering, Engineering +9

1–5 of 39