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ASM International (Finland)

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Publications

224

Citations

5.1K

Authors

14

Location

Helsinki, Finland

Also known as ASMi · Advanced Semiconductor Materials

ASM International (Finland) is a company institution in Helsinki, Finland known for engineering, materials science, and surface science.

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Publications

224

Film Uniformity in Atomic Layer Deposition

Kai‐Erik Elers, Tom Blomberg, M. Peussa et al. · Chemical Vapor Deposition · 2006 · 124 citations

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History of atomic layer deposition and its relationship with the American Vacuum Society

Gregory N. Parsons, Jeffrey W. Elam, Steven M. George et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 104 citations · Full text

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Atomic Layer Deposition of Silicon Nitride from Bis(<i>tert</i>-butylamino)silane and N<sub>2</sub> Plasma

Harm C. M. Knoops, Eline M. J. Braeken, Koen de Peuter et al. · ACS Applied Materials & Interfaces · 2015 · 103 citations · Full text

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2D materials: roadmap to CMOS integration

Cedric Huyghebaert, T. Schram, Quentin Smets et al. · 2018 · 94 citations

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Under‐ice metabolism in a shallow lake in a cold and arid climate

Shuang Song, Changyou Li, Xiaohong Shi et al. · Freshwater Biology · 2019 · 75 citations · Full text

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1–5 of 224

Authors

14

  1. ET
    E. Tois

    ASM International (Finland), Finland

    38 publications · 379 citations

    13

    h-index

  2. TB
    Tom Blomberg

    ASM International (Finland), Finland

    45 publications · 738 citations

    13

    h-index

  3. VS
    Varun Sharma

    ASM International (Finland), Finland

    13 publications · 248 citations

    7

    h-index

  4. SG
    Sylvain Garaud

    ASM International (Finland), Finland

    17 publications · 38 citations

    4

    h-index

  5. JC
    Jong-Young Cho

    ASM International (Finland), Finland

    7 publications · 61 citations

    4

    h-index

1–5 of 14