ASM International (Finland)

Film Uniformity in Atomic Layer Deposition

Kai‐Erik Elers, Tom Blomberg, M. Peussa et al. · Chemical Vapor Deposition · 2006 · 124 citations

Materials Science, Surface Technology, Engineering +11

History of atomic layer deposition and its relationship with the American Vacuum Society

Gregory N. Parsons, Jeffrey W. Elam, Steven M. George et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 104 citations · Full text

Ald Science, Engineering, American Vacuum Society +20

Atomic Layer Deposition of Silicon Nitride from Bis(<i>tert</i>-butylamino)silane and N₂ Plasma

Harm C. M. Knoops, Eline M. J. Braeken, Koen de Peuter et al. · ACS Applied Materials & Interfaces · 2015 · 103 citations · Full text

Materials Science, Semiconductors, Electrical Engineering +15

2D materials: roadmap to CMOS integration

Cedric Huyghebaert, T. Schram, Quentin Smets et al. · 2018 · 94 citations

Engineering, Device Integration, Low Dimensional Material +17

Under‐ice metabolism in a shallow lake in a cold and arid climate

Shuang Song, Changyou Li, Xiaohong Shi et al. · Freshwater Biology · 2019 · 75 citations · Full text

Shallow Lake, Ice-water System, Biogeochemistry +14