Concepedia

Varun Sharma

VS

Statistics

Publications

5

Citations

237

H-Index

5

Active since

2013

Affiliations

ASM International (Finland)(Current)

University of Helsinki

University of Colorado Boulder

Varun Sharma is an author at ASM International (Finland) specializing in materials science, surface oxidation, and materials engineering.

Publications per year

2013–2023

5

Publications

5

Intrinsic transistor reliability improvements from 22nm tri-gate technology

S. Ramey, A. Ashutosh, C. Auth et al. · 2013 · 167 citations

Engineering, Electrical Engineering, Electronic Materials +15

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 28 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Thermal Atomic Layer Etching of Aluminum Oxide (Al<sub>2</sub>O<sub>3</sub>) Using Sequential Exposures of Niobium Pentafluoride (NbF<sub>5</sub>) and Carbon Tetrachloride (CCl<sub>4</sub>): A Combined Experimental and Density Functional Theory Study of the Etch Mechanism

Varun Sharma, Simon D. Elliott, Tom Blomberg et al. · Chemistry of Materials · 2021 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Quantitative mineralogical analysis of clay-containing materials using ATR-FT-IR spectroscopy with PLS method

Signe Vahur, Lisett Kiudorv, Peeter Somelar et al. · Analytical and Bioanalytical Chemistry · 2021 · 13 citations

Natural Sciences, Earth Sciences, Soil Sciences +17

Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Jonathan L. Partridge, Varun Sharma, Jessica A. Murdzek et al. · Applied Surface Science · 2023 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

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