Jessica A. Murdzek

Effect of crystallinity on thermal atomic layer etching of hafnium oxide, zirconium oxide, and hafnium zirconium oxide

Jessica A. Murdzek, Steven M. George · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17

In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs

Wenjie Lu, Young‐Hee Lee, Jonas C. Gertsch et al. · Nano Letters · 2019 · 43 citations

Engineering, Materials Engineering, Materials Science +17

First Transistor Demonstration of Thermal Atomic Layer Etching: InGaAs FinFETs with sub-5 nm Fin-width Featuring in situ ALE-ALD

Wenjie Lu, Young‐Hee Lee, Jessica A. Murdzek et al. · 2018 · 34 citations

Engineering, Electrical Engineering, Materials Science +17

Thermal atomic layer etching of amorphous and crystalline Al2O3 films

Jessica A. Murdzek, Adarsh Rajashekhar, Raghuveer S. Makala et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 28 citations · Full text

Engineering, Materials Engineering, Materials Science +17