Jonas C. Gertsch - Concepedia

Author

Jonas C. Gertsch

University of Colorado Boulder ORCID

Also Known As

J C Gertsch, J.C. Gertsch, Jonas C Gertsch, Jonas C. Gertsch, Jonas Gertsch

Publications

220

Citations

H-Index

Concepts

All Affiliations

University of Colorado Boulder

About

Jonas C. Gertsch is an author at University of Colorado Boulder specializing in engineering, applied physics, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	95
2	Applied Physics	3	3	95
3	Natural Sciences	1	1	34
4	Chemical Engineering	1	1	27
5	Chemistry	1	1	27

Jonas C. Gertsch

Publications

187

Citations

H-Index

Page 1

	Year	Citations
In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs Wenjie Lu, Young‐Hee Lee, Jonas C. Gertsch, Nano Letters	2019	40
Hemispherical micro-resonators from atomic layer deposition Jason M. Gray, J. P. Houlton, Jonas C. Gertsch, Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringMetamaterialsVacuum DeviceMicro-optical Component	2014	34
First Transistor Demonstration of Thermal Atomic Layer Etching: InGaAs FinFETs with sub-5 nm Fin-width Featuring in situ ALE-ALD Wenjie Lu, Young‐Hee Lee, Jessica A. Murdzek, Semiconductor TechnologyElectrical EngineeringIngaas FinfetsEngineeringThermal Ale Technique	2018	34
SF<sub>4</sub> as the Fluorination Reactant for Al<sub>2</sub>O<sub>3</sub> and VO<sub>2</sub> Thermal Atomic Layer Etching Jonas C. Gertsch, Austin M. Cano, Victor M. Bright, Chemistry of Materials Aluminium NitrideEngineeringSurface NanotechnologyChemistryChemical Engineering	2019	27
Ultrathin thermoacoustic nanobridge loudspeakers from ALD on polyimide Joseph J. Brown, N.C. Moore, Omkar D. Supekar, Nanotechnology	2016	15
Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges Nathan T. Eigenfeld, Jonas C. Gertsch, George D. Skidmore, Nanoscale	2015	13
Deposit and etchback approach for ultrathin Al2O3 films with low pinhole density using atomic layer deposition and atomic layer etching Jonas C. Gertsch, Emanuele Sortino, Victor M. Bright, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films	2021	13
Atomic layer deposition ultrathin film origami using focused ion beams Omkar D. Supekar, Joseph J. Brown, Nathan T. Eigenfeld, Nanotechnology	2016	11

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