Concepedia

Austin M. Cano

AM

Statistics

Publications

9

Citations

360

H-Index

9

Active since

2001

Affiliations

University of Colorado Boulder(Current)

Schrodinger (United States)

Aalto University

University College Cork

Austin M. Cano is an author at University of Colorado Boulder specializing in engineering, chemistry, and applied physics.

Top concepts

Publications per year

2001–2022

9

Publications

9

Thermal Atomic Layer Etching of SiO<sub>2</sub> by a “Conversion-Etch” Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride

Jaime W. DuMont, Amy E. Marquardt, Austin M. Cano et al. · ACS Applied Materials & Interfaces · 2017 · 132 citations

Effect of HF Pressure on Thermal Al<sub>2</sub>O<sub>3</sub>Atomic Layer Etch Rates and Al<sub>2</sub>O<sub>3</sub>Fluorination

Austin M. Cano, Amy E. Marquardt, Jaime W. DuMont et al. · The Journal of Physical Chemistry C · 2019 · 87 citations

, , +11

Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum

Tyler J. Myers, Austin M. Cano, Diane K. Lancaster et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 29 citations · Full text

, , +18

SF<sub>4</sub> as the Fluorination Reactant for Al<sub>2</sub>O<sub>3</sub> and VO<sub>2</sub> Thermal Atomic Layer Etching

Jonas C. Gertsch, Austin M. Cano, Victor M. Bright et al. · Chemistry of Materials · 2019 · 27 citations

, , +16

Influence of triacylglycerol characterics on the determination of free fatty acids in vegetable oils by fourier transform infrared spectroscopy

Tom Verleyen, Roland Verhé, Austin M. Cano et al. · Journal of the American Oil Chemists Society · 2001 · 24 citations

, , +13

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