Austin M. Cano - Concepedia

Author

Austin M. Cano

University of Colorado Boulder

Also Known As

A. Cano, Austin M. Cano

Publications

366

Citations

H-Index

Concepts

All Affiliations

University of Colorado Boulder Schrodinger (United States)Aalto University University College Cork

About

Austin M. Cano is an author at University of Colorado Boulder specializing in engineering, chemistry, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	6	6	193
2	Applied Physics	6	6	193
3	Chemical Engineering	6	6	193
4	Health Sciences	1	1	24
5	Biostatistics	1	1	24

Austin M. Cano

Publications

360

Citations

H-Index

Page 1

	Year	Citations
Thermal Atomic Layer Etching of SiO<sub>2</sub> by a “Conversion-Etch” Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride Jaime W. DuMont, Amy E. Marquardt, Austin M. Cano, ACS Applied Materials & Interfaces	2017	132
Effect of HF Pressure on Thermal Al<sub>2</sub>O<sub>3</sub>Atomic Layer Etch Rates and Al<sub>2</sub>O<sub>3</sub>Fluorination Austin M. Cano, Amy E. Marquardt, Jaime W. DuMont, The Journal of Physical Chemistry C Materials ScienceAluminium NitrideChemical EngineeringEngineeringCorrosion	2019	87
Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum Tyler J. Myers, Austin M. Cano, Diane K. Lancaster, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Aluminium NitrideZno ConversionEngineeringChemistryChemical Deposition	2021	29
SF<sub>4</sub> as the Fluorination Reactant for Al<sub>2</sub>O<sub>3</sub> and VO<sub>2</sub> Thermal Atomic Layer Etching Jonas C. Gertsch, Austin M. Cano, Victor M. Bright, Chemistry of Materials Aluminium NitrideEngineeringSurface NanotechnologyChemistryChemical Engineering	2019	27
Influence of triacylglycerol characterics on the determination of free fatty acids in vegetable oils by fourier transform infrared spectroscopy Tom Verleyen, Roland Verhé, Austin M. Cano, Journal of the American Oil Chemists Society Food ChemistryFtir MethodFourier TransformLipid AnalysisSpectroscopy	2001	24
Thermal Atomic Layer Etching of Al<sub>2</sub>O<sub>3</sub> Using Sequential HF and BCl<sub>3</sub> Exposures: Evidence for Combined Ligand-Exchange and Conversion Mechanisms Austin M. Cano, Jonathan L. Partridge, Steven M. George Chemistry of Materials Aluminium NitrideEngineeringAtomic Layer EtchingChemistryChemical Deposition	2022	20
Thermal Atomic Layer Etching of Aluminum Nitride Using HF or XeF<sub>2</sub> for Fluorination and BCl<sub>3</sub> for Ligand Exchange Austin M. Cano, Ann Lii-Rosales, Steven M. George The Journal of Physical Chemistry C Materials ScienceMaterials EngineeringChemical EngineeringSequential ExposuresEngineering	2022	18
Prediction and Validation of the Process Window for Atomic Layer Etching: HF Exposure on TiO<sub>2</sub> Suresh Kondati Natarajan, Austin M. Cano, Jonathan L. Partridge, The Journal of Physical Chemistry C EngineeringAtomic Layer EtchingChemistryAle ProcessSurface Processing	2021	12
Spontaneous etching of B2O3 by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory Austin M. Cano, Suresh Kondati Natarajan, Jonathan L. Partridge, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films	2022	11

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