Concepedia

Jaime W. DuMont

JW

Statistics

Publications

11

Citations

834

H-Index

11

Active since

2015

Affiliations

University of Colorado Boulder(Current)

Jaime W. DuMont is an author at University of Colorado Boulder specializing in engineering, materials science, and chemical engineering.

Top concepts

Publications per year

2015–2023

11

Publications

11

Thermal Atomic Layer Etching of SiO<sub>2</sub> by a “Conversion-Etch” Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride

Jaime W. DuMont, Amy E. Marquardt, Austin M. Cano et al. · ACS Applied Materials & Interfaces · 2017 · 132 citations

Atomic Layer Etching of HfO<sub>2</sub>Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)<sub>2</sub>and HF

Young‐Hee Lee, Jaime W. DuMont, Steven M. George · ECS Journal of Solid State Science and Technology · 2015 · 101 citations · Full text

, , +16

Trimethylaluminum as the Metal Precursor for the Atomic Layer Etching of Al<sub>2</sub>O<sub>3</sub> Using Sequential, Self-Limiting Thermal Reactions

Young‐Hee Lee, Jaime W. DuMont, Steven M. George · Chemistry of Materials · 2016 · 99 citations

, , +18

Effect of HF Pressure on Thermal Al<sub>2</sub>O<sub>3</sub>Atomic Layer Etch Rates and Al<sub>2</sub>O<sub>3</sub>Fluorination

Austin M. Cano, Amy E. Marquardt, Jaime W. DuMont et al. · The Journal of Physical Chemistry C · 2019 · 87 citations

, , +11

Atomic Layer Deposition of AlF<sub>3</sub> Using Trimethylaluminum and Hydrogen Fluoride

Young‐Hee Lee, Jaime W. DuMont, Andrew S. Cavanagh et al. · The Journal of Physical Chemistry C · 2015 · 84 citations

, , +10

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