Concepedia

Sylvain Garaud

SG

Statistics

Publications

2

Citations

28

H-Index

2

Active since

2007

Affiliations

ASM International (Finland)(Current)

Sylvain Garaud is an author at ASM International (Finland) specializing in materials engineering, materials science, and engineering.

Top concepts

EngineeringMaterial ScienceMaterials EngineeringThin FilmsApplied PhysicsSurface ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical Insulation

Publications per year

2007–2007

2

Publications

2

Materials characterization of WNxCy, WNx and WCx films for advanced barriers

Henny Volders, Zsolt Tökei, H. Bender et al. · Microelectronic Engineering · 2007 · 14 citations

Materials Engineering, Materials Science, Ii-vi Semiconductor +9

Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning

Rita Vos, Sophia Arnauts, Inge Bovie et al. · ECS Transactions · 2007 · 14 citations

Engineering, Interconnect (Integrated Circuits), Physical Design (Electronics) +16

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