Sophia Arnauts

Evaluation of Megasonic Cleaning for Sub-90nm Technologies

Guy Vereecke, Frank Holsteyns, Sophia Arnauts et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2005 · 48 citations

Materials Science, Chemical Engineering, Engineering +15

Validation of vapor phase decomposition–droplet collection–total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers

David Hellin, Jens Rip, Sophia Arnauts et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2004 · 30 citations

Materials Science, Chemical Engineering, Silicon Wafers +11

Wet-Chemical Approaches for Atomic Layer Etching of Semiconductors: Surface Chemistry, Oxide Removal and Reoxidation of InAs (100)

Dennis H. van Dorp, Sophia Arnauts, Frank Holsteyns et al. · ECS Journal of Solid State Science and Technology · 2015 · 29 citations · Full text

Study of InP Surfaces after Wet Chemical Treatments

Daniel Cuypers, Dennis H. van Dorp, Massimo Tallarida et al. · ECS Journal of Solid State Science and Technology · 2013 · 28 citations · Full text

Wet Chemical Etching of InP for Cleaning Applications

Daniel Cuypers, Stefan De Gendt, Sophia Arnauts et al. · ECS Journal of Solid State Science and Technology · 2013 · 22 citations

Materials Science, Chemical Engineering, Oxide Formation/oxide Dissolution +14