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Validation of vapor phase decomposition–droplet collection–total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers

Materials ScienceChemical EngineeringSilicon WafersEngineeringAnalytical InstrumentationSpectroscopyApplied PhysicsMass SpectrometryMetallic Contamination AnalysisAnalytical ChemistryInstrumentationElemental CharacterizationChemical Vapor DepositionX-ray Fluorescence