44
Publications
1.3K
Citations
19
H-Index
1990
Active since
Affiliations
Guy Vereecke is an author at IMEC specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemical EngineeringMicrofabricationChemistryNanotechnologyNanomaterialsMicroelectronics
Publications per year
1990–2018
44
44
The IMEC clean : A new concept for particle and metal removal on Si surfaces
Marc Meuris, Paul Mertens, A. Opdebeeck et al. · 1995 · 125 citations
Lu‐Tao Weng, Guy Vereecke, M. J. Genet et al. · Surface and Interface Analysis · 1993 · 65 citations
Capturing Wetting States in Nanopatterned Silicon
XiuMei Xu, Guy Vereecke, Chang Chen et al. · ACS Nano · 2013 · 58 citations
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