Characterization of an acoustic cavitation bubble structure at 230 kHz

Andrea Thiemann, Till Nowak, Robert Mettin, +2

Ultrasonics Sonochemistry

CavitationCavitating FlowBubble DynamicEngineeringHydrodynamic Cavitation +3

First Demonstration of Vertically Stacked Gate-All-Around Highly Strained Germanium Nanowire pFETs

E. Capogreco, Liesbeth Witters, Hiroaki Arimura, +21

IEEE Transactions on Electron Devices

Semiconductor TechnologyElectrical EngineeringEngineeringRf SemiconductorPhysics +11

Capturing Wetting States in Nanopatterned Silicon

XiuMei Xu, Guy Vereecke, Chang Chen, +13

ACS Nano

EngineeringNanostructured SurfaceWettingSuper-hydrophobic SurfaceSilicon On Insulator +15

Sonoluminescence and dynamics of cavitation bubble populations in sulfuric acid

Andrea Thiemann, Frank Holsteyns, Carlos Cairós, +1

Ultrasonics Sonochemistry

Cavitating FlowChemical EngineeringBubble DynamicHydrodynamic CavitationCavitation Bubble Populations +3

Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements

H. Schmidt, Frank Holsteyns, Alexander R. Lippert, +9

ECS Journal of Solid State Science and Technology

EngineeringTarget FabricationVacuum DeviceParticulate MatterChemical Engineering +14

Si-cap-free SiGe p-channel FinFETs and gate-all-around transistors in a replacement metal gate process: Interface trap density reduction and performance improvement by high-pressure deuterium anneal

Hans Mertens, R. Ritzenthaler, Hiroaki Arimura, +18

EngineeringIntegrated CircuitsSilicon On InsulatorSemiconductor DeviceSemiconductors +14

Strained Germanium Gate-All-Around pMOS Device Demonstration Using Selective Wire Release Etch Prior to Replacement Metal Gate Deposition

Liesbeth Witters, Hiroaki Arimura, Farid Sebaai, +26

IEEE Transactions on Electron Devices

SemiconductorsSemiconductor TechnologyElectrical EngineeringEngineeringNanoelectronics +10

Evaluation of Megasonic Cleaning for Sub-90nm Technologies

Guy Vereecke, Frank Holsteyns, Sophia Arnauts, +8

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

Materials ScienceChemical EngineeringEngineeringNanoscale ChemistryFragile Structures +13

Study on the bubble transport mechanism in an acoustic standing wave field

Xiaoyu Xi, Frederic Cegla, M. J. S. Lowe, +5

Ultrasonics

Acoustic MethodsBiomedical AcousticsAeroacousticsBubble DynamicEngineering +5

Transient Clustering of Reaction Intermediates during Wet Etching of Silicon Nanostructures

Zainul Aabdin, XiuMei Xu, Soumyo Sen, +4

Nano Letters

EngineeringChemistrySilicon On InsulatorWet Chemical EtchingWet Etching +16