Henny Volders

A new perspective of barrier material evaluation and process optimization

Larry Zhao, Zsolt Tikei, Gianni Giai Gischia et al. · 2009 · 35 citations

Engineering, Material Selection, Planar Capacitor Design +19

Study of metal barrier deposition-induced damage to porous low-k materials

Larry Zhao, Henny Volders, Mikhaı̈l R. Baklanov et al. · Microelectronic Engineering · 2011 · 28 citations

Materials Engineering, Materials Science, Engineering +11

Impact of “terminal effect” on Cu electrochemical deposition: Filling capability for different metallization options

Silvia Armini, Zsolt Tökei, Henny Volders et al. · Microelectronic Engineering · 2010 · 24 citations

Materials Science, Materials Engineering, Chemical Engineering +7

CMP process optimization for improved compatibility with advanced metal liners

N. Heylen, Yunlong Li, Kristof Kellens et al. · 2010 · 18 citations

Engineering, Industrial Engineering, Mechanical Engineering +20

In situ X-ray diffraction study of self-forming barriers from a Cu–Mn alloy in 100nm Cu/low-k damascene interconnects using synchrotron radiation

Christopher J. Wilson, Henny Volders, Kristof Croes et al. · Microelectronic Engineering · 2009 · 14 citations

Materials Science, Engineering, Cu–mn Alloy +6