Concepedia
Statistics
Publications
9
Citations
161
H-Index
Active since
2008
Affiliations
IMEC(Current)
KU Leuven
Applied Materials (United States)
Material (Belgium)
Panasonic (Japan)
Kristof Kellens is an author at IMEC specializing in engineering, materials science, and microelectronics.
Publications per year
2008–2012
Gate-last vs. gate-first technology for aggressively scaled EOT logic/RF CMOS
A. Veloso, L.-Å. Ragnarsson, M. J. Cho et al. · Symposium on VLSI Technology · 2011 · 31 citations
Engineering, Electrical Engineering, Materials Science +17
Integration of Vertical Carbon Nanotube Bundles for Interconnects
Nicolò Chiodarelli, Kristof Kellens, Daire Cott et al. · Journal of The Electrochemical Society · 2010 · 31 citations
Engineering, Materials Engineering, Materials Science +17
Process control & integration options of RMG technology for aggressively scaled devices
A. Veloso, Yuichi Higuchi, Soon Aik Chew et al. · 2012 · 21 citations
Engineering, Electrical Engineering, Microelectronics +16
CMP process optimization for improved compatibility with advanced metal liners
N. Heylen, Yunlong Li, Kristof Kellens et al. · 2010 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +15
Air gap formation by UV-assisted decomposition of CVD material
Marianna Pantouvaki, A. Humbert, E. VanBesien et al. · Microelectronic Engineering · 2008 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +4
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