Concepedia

Publication | Closed Access

Air gap formation by UV-assisted decomposition of CVD material

DOI

14

Citations

6

References

2008

Year

Marianna Pantouvaki, A. Humbert, E. VanBesien, Elisabeth Camerotto, Youssef Travaly, Myriam Willegems, Henny Volders, Kristof Kellens, R. Daamen, R.J.O.M. Hoofman,
Microelectronic Engineering

References

YearCitations

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