Elisabeth Camerotto

Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below

Stefan Decoster, Elisabeth Camerotto, Gayle Murdoch et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2022 · 39 citations

Engineering, Materials Engineering, Materials Science +17

Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields

Elisabeth Camerotto, Steven Brems, Marc Hauptmann et al. · Journal of Applied Physics · 2012 · 20 citations

Natural Sciences, Materials Science, Acoustics +16

The Influence of Dissolved Carbon Dioxide on Cavitation Intensity in Ultrasound Cleaning Systems

Steven Brems, Marc Hauptmann, Elisabeth Camerotto et al. · Japanese Journal of Applied Physics · 2013 · 17 citations

Natural Sciences, Radiology, Acoustics +16

Influence of gasification on the performance of a 1MHz nozzle system in megasonic cleaning

Marc Hauptmann, Steven Brems, Elisabeth Camerotto et al. · Microelectronic Engineering · 2009 · 15 citations · Full text

Engineering, Aerospace Engineering, Computational Fluid Dynamics +7

Air gap formation by UV-assisted decomposition of CVD material

Marianna Pantouvaki, A. Humbert, E. VanBesien et al. · Microelectronic Engineering · 2008 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +4