Concepedia

Influence of gasification on the performance of a 1MHz nozzle system in megasonic cleaning

Marc Hauptmann, Steven Brems, Elisabeth Camerotto, Aaldert Zijlstra, Geert Doumen, Twan Bearda, Paul Mertens, Walter Lauriks

Microelectronic Engineering · 2009 · 15 citations · 7 references

DOIFull text

Open access

Concepts

References

7

Single-bubble sonoluminescence

Michael P. Brenner, Sascha Hilgenfeldt, Detlef Lohse · Reviews of Modern Physics · 2002 · 1K citations · Full text

, , +13

Theory of Rectified Diffusion of Mass into Gas Bubbles

Din-Yu Hsieh, M. S. Plesset · The Journal of the Acoustical Society of America · 1961 · 172 citations

, , +16

Mechanism of particle removal by megasonic waves

Wonjung Kim, Tae‐Hong Kim, Jaehyuck Choi et al. · Applied Physics Letters · 2009 · 123 citations

, , +12

Bjerknes Forces in Stationary Sound Fields

Francis G. Blake · The Journal of the Acoustical Society of America · 1949 · 83 citations

, , +6

Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles

Kai Xu, Rita Vos, Guy Vereecke et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2003 · 22 citations

, , +11