Concepedia

Publication | Open Access

Influence of gasification on the performance of a 1MHz nozzle system in megasonic cleaning

DOIFull Paper Access

14

Citations

7

References

2009

Year

Marc Hauptmann, Steven Brems, Elisabeth Camerotto, Aaldert Zijlstra, Geert Doumen, Twan Bearda, Paul Mertens, Walter Lauriks
Microelectronic Engineering

References

YearCitations

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