30
Publications
746
Citations
16
H-Index
1998
Active since
Rita Vos is an author at IMEC specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsChemical EngineeringMicrofabricationElectrical EngineeringMaterials EngineeringNanoelectronics
Publications per year
1998–2020
30
30
Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Kai Xu, Rita Vos, Guy Vereecke et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 57 citations
Engineering, Brush Scrubber Cleaning, Chemical Engineering +22
Particle adhesion and removal mechanisms during brush scrubber cleaning
Kai Xu, Rita Vos, Guy Vereecke et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 54 citations
Materials Science, Brush Scrubbers, Chemical Engineering +12
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