Gayle Murdoch

A comparison of CuO and Cu2O hole-injection layers for low voltage organic devices

Gayle Murdoch, Mark Greiner, Michael G. Helander et al. · Applied Physics Letters · 2008 · 54 citations

Engineering, Materials Engineering, Materials Science +17

Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below

Stefan Decoster, Elisabeth Camerotto, Gayle Murdoch et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2022 · 39 citations

Engineering, Materials Engineering, Materials Science +17

193nm immersion lithography for high-performance silicon photonic circuits

Shankar Kumar Selvaraja, Gustaf Winroth, S. Locorotondo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 33 citations

Engineering, Electrical Engineering, Microfabrication +16

Feasibility study of fully self aligned vias for 5nm node BEOL

Gayle Murdoch, J. Bömmels, Christopher J. Wilson et al. · 2017 · 32 citations

Engineering, Electrical Engineering, Microelectronics +16

Controlled cobalt recess for advanced interconnect metallization

Antoine Pacco, Yuya Akanishi, Quoc Toan Le et al. · Microelectronic Engineering · 2019 · 31 citations

Engineering, Materials Engineering, Materials Science +11