Gayle Murdoch

A comparison of CuO and Cu2O hole-injection layers for low voltage organic devices

Gayle Murdoch, Mark Greiner, Michael G. Helander et al. · Applied Physics Letters · 2008 · 54 citations

Engineering, Organic Electronics, Photo-electrochemical Cell +20

Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below

Stefan Decoster, Elisabeth Camerotto, Gayle Murdoch et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2022 · 38 citations

Engineering, Pattern Transfer, Solid-state Chemistry +18

193nm immersion lithography for high-performance silicon photonic circuits

Shankar Kumar Selvaraja, Gustaf Winroth, S. Locorotondo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 33 citations

Feasibility study of fully self aligned vias for 5nm node BEOL

Gayle Murdoch, J. Bömmels, Christopher J. Wilson et al. · 2017 · 32 citations

3D Ic Architecture, Electrical Engineering, Physical Design (Electronics) +15

Damage free integration of ultralow-k dielectrics by template replacement approach

L. Zhang, Jean‐François de Marneffe, N. Heylen et al. · Applied Physics Letters · 2015 · 29 citations · Full text

Engineering, Cu/low-k Integration, Blanket Wafers +17