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Yuya Akanishi

YA

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Publications

2

Citations

43

H-Index

2

Active since

2019

Affiliations

SCREEN (Japan)(Current)

Yuya Akanishi is an author at SCREEN (Japan) specializing in materials engineering, materials science, and metallization.

Publications per year

2019–2021

2

Publications

2

Controlled cobalt recess for advanced interconnect metallization

Antoine Pacco, Yuya Akanishi, Quoc Toan Le et al. · Microelectronic Engineering · 2019 · 31 citations

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Roughness and Uniformity Control during Wet Etching of Molybdenum

Antoine Pacco, Yuya Akanishi, Quoc Toan Le · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2021 · 12 citations

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