Concepedia
Statistics
Publications
1
Citations
14
H-Index
Active since
2007
Inge Bovie is an author specializing in electronic packaging, microfabrication, and materials engineering.
Top concepts
EngineeringSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical InsulationMaterials EngineeringElectrical Engineering
Publications per year
2007–2007
Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning
Rita Vos, Sophia Arnauts, Inge Bovie et al. · ECS Transactions · 2007 · 14 citations
Engineering, Interconnect (Integrated Circuits), Physical Design (Electronics) +16
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