Concepedia

Scanning Capacitance Microscopy

Scanning Capacitance Microscopy is a scanning probe microscopy technique that measures local variations in capacitance between a conductive atomic force microscope tip and a sample surface to map carrier concentration and dopant profiles in semiconductor materials with nanoscale resolution.

249

Publications

8.7K

Citations

705

Authors

202

Institutions

Publications per year

2017–2026

14

Parents

Publications

249

Scanning capacitance microscopy imaging of threading dislocations in GaN films grown on (0001) sapphire by metalorganic chemical vapor deposition

P. Hansen, Y. E. Strausser, Andrew Erickson et al. · Applied Physics Letters · 1998 · 263 citations

, , +17

Charge storage in a nitride-oxide-silicon medium by scanning capacitance microscopy

R. C. Barrett, C. F. Quate · Journal of Applied Physics · 1991 · 246 citations

, , +17

Scanning capacitance microscopy

James R. Matey, J. Blanc · Journal of Applied Physics · 1985 · 234 citations

, , +17

TWO-DIMENSIONAL DOPANT PROFILING BY SCANNING CAPACITANCE MICROSCOPY

C. C. Williams · Annual Review of Materials Science · 1999 · 225 citations

, , +17

Scanning capacitance microscopy on a 25 nm scale

C. C. Williams, W. P. Hough, S. A. Rishton · Applied Physics Letters · 1989 · 214 citations

, , +17

1–5 of 249

Authors

705

  1. CC
    C. C. Williams

    University of Utah, United States

    19 publications · 1.3K citations

    17

    h-index

  2. FG
    Filippo Giannazzo

    Institute for Microelectronics and Microsystems, Italy

    24 publications · 797 citations

    16

    h-index

  3. VR
    V. Raineri

    Institute for Microelectronics and Microsystems, Italy

    21 publications · 693 citations

    16

    h-index

  4. JJ
    Joseph J. Kopanski

    National Institute of Standards and Technology, United States

    17 publications · 574 citations

    14

    h-index

  5. JF
    J. F. Marchiando

    National Institute of Standards and Technology, United States

    11 publications · 382 citations

    11

    h-index

1–5 of 705

Institutions

202

  1. Institute for Microelectronics and Microsystems

    Catania, Italy

    16 h-index

    80 publications

    2.6K citations

  2. University of Utah

    Salt Lake City, United States

    16 h-index

    40 publications

    1.9K citations

  3. National Institute of Standards and Technology

    Gaithersburg, United States

    15 h-index

    50 publications

    2K citations

  4. University of Catania

    Catania, Italy

    12 h-index

    31 publications

    914 citations

  5. IMEC

    Leuven, Belgium

    10 h-index

    52 publications

    2.4K citations

  6. TU Wien

    Vienna, Austria

    9 h-index

    43 publications

    935 citations

  7. University of Cambridge

    Cambridge, United Kingdom

    9 h-index

    45 publications

    1.2K citations

  8. KTH Royal Institute of Technology

    Stockholm, Sweden

    8 h-index

    25 publications

    426 citations

1–8 of 202

Venues

  1. Applied Physics Letters

    64 publications · 2.7K citations

    29

    h-index

  2. 22

    h-index

  3. Journal of Applied Physics

    28 publications · 1.2K citations

    18

    h-index

  4. Japanese Journal of Applied Physics

    JJAP · 11 publications · 201 citations

    10

    h-index

  5. Review of Scientific Instruments

    8 publications · 492 citations

    8

    h-index

1–5