Andrew Erickson

Scanning capacitance microscopy imaging of threading dislocations in GaN films grown on (0001) sapphire by metalorganic chemical vapor deposition

P. Hansen, Y. E. Strausser, Andrew Erickson et al. · Applied Physics Letters · 1998 · 261 citations

Materials Science, Aluminium Nitride, Electrical Engineering +15

Two-dimensional scanning capacitance microscopy measurements of cross-sectioned very large scale integration test structures

G. Neubauer, Andrew Erickson, C. C. Williams et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 81 citations

Engineering, Microscopy, Integrated Circuits +19

Electrical characterization of semiconductor materials and devices using scanning probe microscopy

Peter Wolf, E. G. Brazel, Andrew Erickson · Materials Science in Semiconductor Processing · 2001 · 49 citations

Materials Science, Semiconductors, Electrical Engineering +13

Quantitative scanning capacitance microscopy analysis of two-dimensional dopant concentrations at nanoscale dimensions

Andrew Erickson, L.P. Sadwick, G. Neubauer et al. · Journal of Electronic Materials · 1996 · 39 citations

Materials Science, Nanoscale System, Engineering +10

Observation of metal–oxide–semiconductor transistor operation using scanning capacitance microscopy

C.Y. Nakakura, Dale L. Hetherington, M.R. Shaneyfelt et al. · Applied Physics Letters · 1999 · 39 citations · Full text

Semiconductor Technology, Electrical Engineering, Scm Images +11