Dale L. Hetherington

A three-dimensional photonic crystal operating at infrared wavelengths

Shawn-Yu Lin, J. G. Fleming, Dale L. Hetherington et al. · Nature · 1998 · 1.1K citations

Natural Sciences, Materials Engineering, Materials Science +14

Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing

B.E. Stine, Dennis O. Ouma, R. Divecha et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 139 citations

Engineering, Electrical Engineering, Materials Science +16

Optical interferometry for surface measurements of CMP pads

David J. Stein, Dale L. Hetherington, Tom Stout · Journal of Electronic Materials · 1996 · 88 citations

Engineering, Electrical Engineering, Materials Science +16

In Situ Electrochemical Investigation of Tungsten Electrochemical Behavior during Chemical Mechanical Polishing

David J. Stein, Dale L. Hetherington, T.R. Guilinger et al. · Journal of The Electrochemical Society · 1998 · 83 citations

Natural Sciences, Materials Engineering, Materials Science +17

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +15